RF/Microwawe/THz MEMS Group

The Dept of Micro and Nanosystems at the School of Electrical Engineering at KTH is a leading European academic research entity on micro/nanofabrication and micro-electromechanical systems (MEMS), consisting of 40 staff members incl. PhD students. Current research focuses on RF-to-THz MEMS, optical-MEMS, Bio-MEMS, and medical MEMS. Close collaboration with Swedish and international industries has led to a few successfully commercialized MEMS devices, for instance a micromachined intravascular blood pressure sensor commercialized by Radi Medical Systems and sold now in volumes of over 100,000 sensors/year. Five PhDs of the Dept founded Silex Microsystems in 2000, currently the world’s largest independent MEMS foundry. The Dept has expertise in design, modelling, simulation, fabrication and characterization of complex microsystems. Industrial collaboration is tight with European key players in the MEMS fabrication business, including ST Microelectronics, SensoNor, Silex Microsystems. KTH-EE-MNS has been coordinator of the FP6/7 projects INTOPSENS, ROUTINE, ICU, Q2M, and partner and WP leader in the FP6/7 projects SABIO, PHODYE, POSITIVE, FNIR, TUMESA, NEMIAC. The Dept has received in total three ERC grants, and three national framework programmes in microsystem technology.

The RF/Microwave/THz MEMS group at KTH is headed by Prof. Joachim Oberhammer, and currently (2016) consists of 7 PhD students, 3 post-docs, and the senior researcher Dmitri Lioubtchenko, who is in charge of CELTA at KTH. The group has been leading a couple of major projects on RF MEMS, including a EUR 2.4 million Scandinavian ICP Programme project on RF MEMS for automotive radar (2006-2010) and a EUR 3.5 million Swedish Future Electronics & Photonics framework programme on millimeter-wave systems (2014-2019). Prof. Oberhammer is recipient of an ERC Consolidator Grant in 2013 (EUR 1.7 million). PhD students from this group received a total of 6 Best Paper Awards and 4 IEEE Graduate Fellowships since 2009.

Link to Dept/Research Group at KTH website